Vacuum resistant fiber sensor heads
For vacuum applications in clean, hot environments the vaccuum resistant fibers and connecting flanges provide a long operational lifetime and vaccuum integrity.
- Leakage rate of 1x10-10 Pa*m3/s max
- Heat resistance up to 200°C
- Detergent resistant fluororesin or stainless steel fiber sheath
For the detection of wafers in non-vacuum environments, see E32 Special application.